Electrochemical micromachining of p-type silicon

Article Abstract:

A demonstration that electrochemical machining of p-Si substrates may be accomplished in an HF-based solution using nanosecond pulses applied between the substrate and a tungsten tool electrode is presented. The study concluded that micrometer precision may be obtained with highly doped substrates and that experimental data can be explained within a simple model, taking the charging time of the interface without application of a mask on the surface.

Silicon, Electric properties, Electrochemistry, Substrates

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The color of the MgO surface-a UV/Vis diffuse reflectance investigation of electron traps

Article Abstract:

The influence of H2 pressure during surface color center formation is investigated by the UV/Vis reflectance study to elucidate the effect of the underlying chemistry and photochemistry on the optical properties of the polycrystalline MgO surface. A mechanism for the trapping process of hydrogen-derived electrons on the MgO surface is proposed on the basis of previous infrared spectroscopic findings.

Magnesium Oxide, Surface chemistry, Ultraviolet spectroscopy, Properties

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