Effect of geometry and materials on residual stress management in thin films by using the focused ion beam
Article Abstract:
A method for residual stress measurements in thin films by using the focused ion beam (FIB) is presented. A simple equation based on two-dimensional elasticity is used to evaluate the residual stress from the displacements due to introducing a slot. The effect of material dissimilarity between film and substrate is explored.
Publication Name: Journal of Engineering Materials and Technology
Subject: Science and technology
ISSN: 0094-4289
Year: 2004
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Instrumented microindentation of nanoporous alumina films
Article Abstract:
The mechanical behavior of anodic alumina thin films with organized nanometer-scale porosity is examined. The films showed increasing hardness/modulus with a decrease in pore volume fraction or transformation from amorphous to a polycrystalline alpha-gamma phase.
Publication Name: Journal of Engineering Materials and Technology
Subject: Science and technology
ISSN: 0094-4289
Year: 2006
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Structure and properties of electrocodeposited Cu-Al2O3 nanocomposite thin films
Article Abstract:
The structure and properties of electrocodeposited Cu-Al2O3 nanocomposite thin films are examined. The hardness of the nanocomposite thin film is found to be approximately 25 percent higher than the hardness of the control films of pure copper.
Publication Name: Journal of Engineering Materials and Technology
Subject: Science and technology
ISSN: 0094-4289
Year: 2005
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