Journal of Physical Chemistry B 2004 Charles B. Musgrave - Abstracts

Journal of Physical Chemistry B 2004 Charles B. Musgrave
TitleSubjectAuthors
A quantum chemical study of the atomic layer deposition of Al2O3 using AlCl3 and H2O as precursors .Chemicals, plastics and rubber industriesCharles B. Musgrave, Annica Heyman
Atomic layer deposition of HfO2 using alkoxides as precursors.Chemicals, plastics and rubber industriesCharles B. Musgrave, Collin Mui
Quantum chemistry based statistical mechanical model of hydrogen desorption from Si(100)-2-*1, Ge(100)-2*1, and SiGe alloy surfaces.Chemicals, plastics and rubber industriesCharles B. Musgrave, Collin Mui, Stacey F. Bent
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