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Electronics and electrical industries

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PFCs in the semiconductor industry: a primer

Article Abstract:

The semiconductor industry is faced with the challenge of reducing its perfluorocompounds (PFC) emissions due to its influence on global warming. Methods for emissions reduction have been developed including a 10% reduction of PFC emissions by 2010 using a multi-pronged approach. Through intense research and a worldwide effort, optimization, substitution, recovery and abatement have been created to enable semiconductor manufacturers to achieve their reduction goal. The cost of abatement methodologies has also been reduced which makes abatement more economically feasible on a large scale.

Production management

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Progress in managing PFCs

Article Abstract:

Several speakers at SEMI's PFC Technical Update in July 1998, presented their reports on refined methods of abatement, which is among the notable perfluorocarbon (PFC) emission reduction techniques. The reports, which also discussed process optimization, were given with the aim of procuringshort-term reductions in PFC emissions until proper alternatives can be determined. Aside from abatement, other PFC-emission reduction methods are recycle, capture and use of alternative chemistries and process optimization.

United States, Semiconductor devices

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MEMS developments include electronics, optics

Article Abstract:

The variety of microelectro-mechanical systems (MEMS) technology advancements has greatly increased, with almost all the focus in MEMS technology was on realizing mechanical components that include micromotors, micro-flow controllers and accelerometers. For instance, Albuquerque, NM-based Sandia National Laboratories has incorporated MEMS and CMOS devices on a chip. Meanwhile, Lucent Technologies has developed some addressable reflectors for wavelength division multiplexing of optical signals in fibers.

Manufacturing processes

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