Silicon micromechanics: sensors and actuators on a chip
Article Abstract:
The field of micromechanics is in its infancy and the 1990s should see commercial applications begin to emerge. These mechanical structures, about the size of a flea, are expected to transform the control of large mechanical structures such as automobiles. Integrated circuit processers such as photolithograph, thin-film deposition, and chemical and plasma etching are used to fabricate these devices on silicon substrates. There are two main categories for fabrication techniques for micromechanical structures: bulk micromaching, which involves using chemical etchants to sculpt the silicon substrate, and surface micromachining, etching layers of thin films deposited upon the substrate. A number of companies are working on silicon accelerometers for active suspensions, anti-skid systems, and air-bags in automobiles.
Publication Name: IEEE Spectrum
Subject: Engineering and manufacturing industries
ISSN: 0018-9235
Year: 1990
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Sensors and Actuators
Article Abstract:
Electric sensors and actuators using integrated circuits are becoming more precise. Advanced manufacturing systems use such technologies as microelectronic sensors and microcomputer-based 'smart' sensors. The choices for sensors are large and for position sensing include potentiometers, linear variable differential transformers (LVDT), resolvers, optical encoders, capacitive sensors, and laser interferometers. Actuators for machine control do not come in as great a variety but must be chosen with care. Automatic part inspection, precise drilling control, and a three-dimensional probe are illustrated. Diverse sensors and actuators on a milling machine and robot are also shown.
Publication Name: IEEE Spectrum
Subject: Engineering and manufacturing industries
ISSN: 0018-9235
Year: 1983
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Smart sensors
Article Abstract:
The importance and advantages of analog sensors are discussed.
Publication Name: IEEE Spectrum
Subject: Engineering and manufacturing industries
ISSN: 0018-9235
Year: 2006
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