Dilute chemistries: promise and caution
Article Abstract:
The Engineering Research Center for Environmentally Benign Semiconductor Manufacturing at the University of Arizona has conducted work on dilute chemistries which has resulted in the conclusion that a cautious approach is in order in its utilization. Although dilute chemistries offer several advantages, its use is not as straightforward as it first appeared. The burden, environmental and otherwise, shifts from one location to another, with someone else paying the price which might may result in the net waste being higher. The switch to dilute chemistries may require changing their composition or adding other compounds to cope with the high-purity requirement.
Publication Name: Semiconductor International
Subject: Electronics and electrical industries
ISSN: 0163-3767
Year: 2000
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E-beam system provides volume production capability
Article Abstract:
KLA-Tencor of San Jose, CA, has unveiled eS20, which is touted to be the first in-line scanning E-beam defect-detection system for aluminum device shrinks and copper devices. The 200/300mm bridge tool is intended for volume production and achieves speed that is up to 75 times as any other available tool. The E-beam system is most suitable for post-CMP and post- etch monitoring.
Publication Name: Semiconductor International
Subject: Electronics and electrical industries
ISSN: 0163-3767
Year: 1999
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