Thermal stability of cubic nitride films deposited by chemical vapor deposition

Article Abstract:

An investigation on the thermal stability of well-crystallized cubic boron nitride (cBN) films grown by chemical vapor deposition is conducted by cathodoluminescence (CL), Raman spectroscopy, and scanning electron microscopy (SEM) with the cBN films annealed at various temperatures up to 1300 degree Celsius. The crystallinity of the cBN films further improves, as indicated by a reduction of the relevant Raman line width, when the annealing temperature exceeds 1100 degree Celsius.

Canada, Spectra, Chemical properties, Nitrides

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Characterization of amorphous hydrogenated carbon formed by low-pressure inductively coupled plasma enhanced chemical vapor deposition using multiple low-inductance antenna units

Article Abstract:

Three-dimensional plasma enhanced chemical vapor deposition of hydrogenated amorphous carbon is demonstrated using a new type high-density volumetric plasma source with multiple low-inductance antenna system. It is found that precisely controlled ion bombardment by pulse biasing led to explicit observation in Raman and IR spectra of the transition from the polymer-like structure to the diamond like carbon structure accompanied by dehydrogenation due to ion bombardment.

Science & research, Research, Carbon allotropes, Ion bombardment, Ion beam irradiation

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Cobalt ultrathin film catalyzed ethanol chemical vapor deposition of single-walled carbon nanotubes

Article Abstract:

A simple and efficient chemical vapor deposition (CVD) process that can grow oriented and long single-walled carbon nanotubes (SWNTs) using a cobalt ultrathin film as the catalyst and ethanol as carbon feedstock is described. It is seen that high quality SWNTs can grown horizontally on various flat substrates and tilting the substrates supporting the Co ultrathin film catalysts can grow more, longer carbon nanotubes.

All Other Basic Inorganic Chemical Manufacturing, Industrial organic chemicals, not elsewhere classified, Industrial inorganic chemicals, not elsewhere classified, Ethanol, Ethyl Alcohol Manufacturing, Cobalt Compounds, Usage, Alcohol, Optical properties, Nanotubes, Alcohol, Denatured

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