MEMS technology creates cheaper DNA chips

Article Abstract:

Researchers at the University of Wisconsin in Madison have developed a new process for synthesizing oligonucleotide microarrays, also called DNA chips. The researchers have developed a maskless array synthesizer (MAS) using a projection technology developed by engineers at Texas Instruments. The MAS is based on a digital micromirror device, which reflects light onto certain regions of a DNA chip.

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A look at overlay error

Article Abstract:

Increased understanding of overlay errors is needed at a time when requirements for mix-and-match lithography schemes run opposite of tighter overlay requirements. While a true value for any particular overlay target is not known, several components of error can be estimated to arrive at a figure called total measurement uncertainty. For tool suppliers, this means decreasing TMU by analyzing it into individual components for individual analysis and optimization.

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Five-level MEMS create true systems

Article Abstract:

Four mechanically active layers and an initial electrical interconnect layer comprise the new five-level microelectromechanical systems (MEMS) technology. The system enables complex interacting mechanisms that are fabricated on moving platforms. Its process module consists of structural polycrystalline silicon layers and sacrificial silicon dioxide layers that are approximately 2.25 microns thick. The technology allows for a greater functionality of MEMS with a potential for a six-level technology.

Other Electrical Equipment and Component Manufacturing, Products & technology - general, Electronic Components

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