System enables non-contact BPSG compositional analysis of wafers

Article Abstract:

On-Line Technologies has developed the FilmExpert IR reflectometry system which provides an accurate measurement capability for BPSG composition. The new technology's algorithm eliminates the constraint found in the statistical analysis employed in previous BPSG analytical methods. It also enables model-based analysis to extract detailed information about surface thin films even on IR-transparent substrates. On-Line Technologies expects the system to be the next major metrology technology for thin films.

Products & technology - general, Silicon Wafers, Semiconductor wafers, On-Line Technologies

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Honeywell president aims to boost company's viability

Article Abstract:

Honeywell Electronic Materials (HEM) Pres Marijn Dekkers discussed in an interview various aspects of his firm's operations, products, strengths and plans. Sunnyvale, CA-based HEM is a $1 billion strategic business unit of Honeywell International. Dekkers was formerly the vp and general manager of the Fluorine Products Business of AlliedSignal and also worked with General Electric in various management positions.

Executive changes & profiles, Semiconductors & Parts NEC, Honeywell Electronic Materials

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Aluminum persists as copper age dawns

Article Abstract:

Aluminum is expected to remain viable for low-cost, high-volume DRAMS as the semiconductor industry moves towards the use of copper for most high- speed devices. Novelus Systems Inc's John Chenault asserted that the rapid switch to copper is mainly hampered by such issues as the limited number of people and design tools for copper use. In addition, the cost-reduction benefits of copper cannot be realized unless copper is used from start to finish.

Product information, Semiconductor Devices

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