Laser post-CMP cleans

Article Abstract:

Motorola Advanced Process Characterization Laboratories studied the removal of surface contamination from flat panel display material, photoresist from silicon wafers and slurry from planarized wafers, using excimer lasers. The laser cleaning procedure, which showed an equal or slightly better reduction in contamination for flat panel material as compared to non-standard wet chemical processes, was done using the Radiance Process. This method, which attains cleaning when the laser light breaks contaminants bonded to the surface, employs a deep UV photon flux from excimer or Nd:YAG lasers, and prevents redeposition on the surface using an inert gas. While not all contaminants were removed from all surfaces, the laser process restored wafers to near virgin conditions of bare silicon wafers.

Comment:

Used excimer lasers in study to remove contaminants from silicon wafers, flat panel display material & planarized wafers

All Other Miscellaneous Electrical Equipment and Component Manufacturing, Lasers for Materials Processing, Lasers, Motorola Advanced Process Characterization Laboratories

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a-C:F carbon: a robust low-k material

Article Abstract:

Researchers from Bell Labs, as well as from NEC and Applied Materials, will discuss a promising low-k material at the International Electron Devices Meeting (IEDM) in San Francisco, CA, from December 6 to 9, 1998. Bell Labs researchers claim that fluorinated amorphous carbon (a-C:F) has resulted in a robust film with k of less than 2.8, good thermal stability, and materials and electrical characteristics that satisfy strict requirements for device integration. Their counterparts at NEC and Applied Materials will also report the successful integration of highly-stable a-C:F film in a 0.18 micrometer CMOS process, particularly on two distinct annealing processes.

Comment:

Researchers will discuss fluorinated amorphous carbon (a-C:F), a promising low-k material, at the Intnl Elecron Devices Meeting

Plastics Material and Resin Manufacturing, Fluorocarbon Resins NEC, Applied Materials Inc., Lucent Technologies Inc. Bell Laboratories, NEC

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Reader's Internet lifestyles

Article Abstract:

The results of a research conducted to know the Internet usage by online shoppers are presented.

Nonstore Retailers, Research, Electronic commerce, E-commerce, Online shopping, User groups, User group

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