Semiconductor International 2000 - Abstracts
Semiconductor International 2000 | |||||
Title | Subject | Authors | |||
---|---|---|---|---|---|
300 mm lithography enters reality. | Electronics and electrical industries | Phillip Ware | |||
A better way of reducing monitor costs. | Electronics and electrical industries | Peters Laura | |||
Absolute pressure control boosts oxide uniformity. | Electronics and electrical industries | Dan Hall, Cole Porter, Lise Laurin | |||
Addressing back-end lithography issues. | Electronics and electrical industries | Ruth DeJulle | |||
A fab is not built by layout alone: the case for a concurrent utility matrix. | Electronics and electrical industries | John Pinho, Sean Williamson | |||
A fresh start for the new millennium. | Electronics and electrical industries | Peter H. Singer | |||
Amkor buys Anam factories. | Electronics and electrical industries | ||||
Automation needs reach new levels. | Electronics and electrical industries | Karl Gartland, Ed Sherwood | |||
A word about innovation. | Electronics and electrical industries | Dan Weber | |||
Capability for 300 mm: approaching industry goals. | Electronics and electrical industries | Karl E. Mautz | |||
Characterize low-k and copper films in situ. | Electronics and electrical industries | Steve Huang, S.H. Lau, Ann Koo | |||
Chemical mechanical polishing optimized for premetal dielectrics. | Electronics and electrical industries | ||||
Detecting non-visual defects is vital for 0.18 micron. | Electronics and electrical industries | Tim Turner | |||
Diagnosing latch-up with backside emission microscopy. | Electronics and electrical industries | Thomas Adams, Thomas Kessler, Friedrich-Wilhelm Wulfert | |||
Enhancing CMP performance. | Electronics and electrical industries | Joe Gisler | |||
Etch tool readiness. | Electronics and electrical industries | Nick Bright | |||
Europeans to develop ferroelectric CMOS process. | Electronics and electrical industries | ||||
Evaluating wafer inspection and cleaning with standard particles. | Electronics and electrical industries | Benjamin Y.H. Liu, Seong-Ho Yoo, Seung-Ki Chae, James J. Sun, Kurt Christenson | |||
Exhibitor outlook. | Electronics and electrical industries | ||||
Full-fab automation challenges. | Electronics and electrical industries | Mike Chase | |||
How to reduce plasma damage in sputtering processes. | Electronics and electrical industries | Duncan Perry, Peter Ansmann, Andreas Jaeger | |||
Improving copper interconnects: a search for useful dopants. | Electronics and electrical industries | James A. Cunningham | |||
Improving yield with protective ceramics. | Electronics and electrical industries | G. Zhang | |||
Interconnect deposition. | Electronics and electrical industries | Paul Carey, Satheesh Kuppurao | |||
Ion implantation challenges. | Electronics and electrical industries | Jim Kawski | |||
IR method characterizes interstitial oxygen in silicon ingots. | Electronics and electrical industries | William M. Hughes, Haresh Siriwardane | |||
Lessons learned from certifying a SMIF fab. | Electronics and electrical industries | Michael Gatov, Bruce Whitefield | |||
Life beyond mix-and-match: controlling sub-0.18 micron overlay errors. | Electronics and electrical industries | Terrence E. Zavecz, Rene Blanquies, Amit Zeidler | |||
Manage W-CVD process: effluents to boost uptime. | Electronics and electrical industries | Youfan Gu, Kevin Grout, Steve Haupt | |||
Marching toward SOC. | Electronics and electrical industries | Genda Hu | |||
Metrology challenges. | Electronics and electrical industries | George J. Collins | |||
Microscopic imaging ellipsometry gives resolution, throughput. | Electronics and electrical industries | ||||
MIT demonstrates 25 nn Gates with chromeless phase-shift masks. | Electronics and electrical industries | Ruth DuJule | |||
Mood swings at Semicon West. | Electronics and electrical industries | ||||
New gas combo improves dielectric etch. | Electronics and electrical industries | ||||
New life for conventional silicon technology? | Electronics and electrical industries | ||||
New strategy at NEC. | Electronics and electrical industries | ||||
PFCs in the semiconductor industry: a primer. | Electronics and electrical industries | Joe Van Gompel | |||
Philips advances 180 nm CMOS. | Electronics and electrical industries | ||||
Plasma abatement reduces PFC emission. | Electronics and electrical industries | Victor Vartanian, Laurie Beu, Tom Lii, David Graves, Eric J. Tonnis, Rusty Jewett | |||
Process module control for advanced gate dielectrics. | Electronics and electrical industries | Clive Hayzelden, Patrick Stevens, David McCain, Daniel Iversen | |||
Qualifying flip-chip underfills. | Electronics and electrical industries | Karl-Friedrich Becker, Tom Adams | |||
Samsung Corning ups nanopowder business. | Electronics and electrical industries | ||||
Serching amidst illusion. | Electronics and electrical industries | Carl Johnson | |||
SISA to focus on supplier value chain. | Electronics and electrical industries | Peter H. Singer | |||
Smart card assembly: requires advanced pre-assembly methods. | Electronics and electrical industries | Jochen Muller, Peter Stampka, Werner Kroninger, Ernst Gaulhofer, Heinz Oyrer | |||
Spin processing offers yield enhancement for 300 mm. | Electronics and electrical industries | ||||
Surface conditioning. | Electronics and electrical industries | Dale A. Courtney | |||
Tailoring polymer properties with ion beams. | Electronics and electrical industries | Nathan Capps, Dan Carter, Greg Roche | |||
Taking a new approach to copper ECD bath management. | Electronics and electrical industries | Olivier Blachier, Jim Clark | |||
Tantalum 101: economics and technology of Ta materials. | Electronics and electrical industries | Christopher A. Michaluk, Richard O. Burt, David P. Lewis | |||
The case for continuous flow transport of wafer carriers. | Electronics and electrical industries | David Feindel, Ulrich Kaempf | |||
Thermal processing: shrinking devices on larger wafers. | Electronics and electrical industries | Joe Hasselbach, Nirmalya Maity, Stuardo Robles | |||
Thermoplastic adhesives: alternative to thermosets. | Electronics and electrical industries | Roy V. Buck Jr. | |||
Using SEMs for automatic defect monitoring. | Electronics and electrical industries | Benoit Hinschberger, Christine Gombar, Ariel Ben-Porath, Laurent Karsenti | |||
WSC Internet policy. | Electronics and electrical industries | ||||
WSC joint statement. | Electronics and electrical industries |
This website is not affiliated with document authors or copyright owners. This page is provided for informational purposes only. Unintentional errors are possible.